Konferenzservice Mandl

Zusammenfassung: Implementation of dual-beam focused ion beam (FIB), basic electron and ion optics, electron/ion interaction with materials and EDS, and criteria for understanding images based on the various available signals and detectors.

Hands-on experiments: HRSEM and FIB imaging, channeling contrast, localized electron/ion induced deposition, enhanced etching, cross-section SEM specimen preparation, H-bar TEM specimen preparation, and Lift-Out TEM specimen preparation.

Six hours of lectures on FIB/SEM followed by 14 hours of hands-on training on the Technion dual beam FIB (Strata 400s).

Transmission Electron Microscopy (TEM): basic electron optics and resolution; point resolution compared to the information limit, reciprocal space and electron diffraction, imaging by diffraction contrast (bright field, dark field, two-beam conditions), phase contrast (contrast transfer function, HRTEM, basic approaches to determining atomic positions, strain measurements), STEM (Z-contrast and EDS), and EFTEM (EELS, energy filters, interpretation of data).

24 hours of lecture followed by 26 hours of experiments on the Technion monochromated and aberration corrected FEG-TEM.